Spectral Ellipsometer (SE) in ISO Class 5 Cleanroom
Spectral Ellipsometer (SE) in ISO Class 5 Cleanroom
Measurement of the thickness of transparent layers on wafers using ellipsometry. Spectral range 240 nm - 2500 nm;
single and multi layer capable; UV-VIS-NIR spectral range;
Müller-Matrix-Analysis; micro spot optics (~200 µm spot). Extensive materials library, even for complex ALD coating systems.Share on
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Spectral Ellipsometer (SE) in ISO Class 5 Cleanroom