Step height profilometer in ISO Class 5 Cleanroom
Measurement of step heights and surface roughness using a measuring probe guided over the specimen. 2D diamond-tipped stylus surface profiler; 2.5 µm radius; programmable force 1–40 mg; measurement range 100 Å–1310 kÅ; scan length 50 µm–50 mm.Name
Step height profilometer in ISO Class 5 CleanroomHome partner institution
Otto von Guericke University Magdeburg