Spectral Ellipsometer (SE) in ISO Class 5 Cleanroom

Measurement of the thickness of transparent layers on wafers using ellipsometry. Spectral range 240 nm - 2500 nm; single and multi layer capable; UV-VIS-NIR spectral range; Müller-Matrix-Analysis; micro spot optics (~200 µm spot). Extensive materials library, even for complex ALD coating systems. Share on