Skip to Content

Step height profilometer in ISO Class 5 Cleanroom

Measurement of step heights and surface roughness using a measuring probe guided over the specimen. 2D diamond-tipped stylus surface profiler; 2.5 µm radius; programmable force 1–40 mg; measurement range 100 Å–1310 kÅ; scan length 50 µm–50 mm.

Name

Step height profilometer in ISO Class 5 Cleanroom

Scientific domain

Semiconductor Technology


 

Microsystems Engineering


 

Nanotechnology


Keywords

Profilometry


 

MST


 

Semiconductor Technology


 

Inspection


Home partner institution

Otto von Guericke University Magdeburg


Technical staff available

Yes

Remote access details

false

Equipment

Dektak³ST, Veeco Instruments Inc.

Open access to updated information database

Yes

Online booking system details

manual calender app