SEM in ISO Class 5 Cleanroom
Investigation of structures at the micron scale, and qualitative and quantitative material analysis using energy-dispersive X-ray analysis. High-resolution imaging; backscattered electron detector (BSE); SE; EDX; automated 5-axis specimen stage; resulution up to 3.5nm; magnification up to 300,000x; high and low vacuum.Name
SEM in ISO Class 5 CleanroomScientific domain
Semiconductor Technology
Microsystems Engineering
Nanotechnology
Keywords
MST
Semiconductor Technology
Wafer Inspection
Physical Microscopy
Home partner institution
Otto von Guericke University Magdeburg