Optical Microscope in ISO Class 5 Cleanroom

Optical inspection of wafer surfaces. 5x, 10x, 20x, 50x, 100x magnification; camera system; binocular; reflected and transmitted light; polarisation & angle adjustment; calibrated measurement of structural dimensions; scanning stage. Software options for stitching, Z-stack.

Name

Scientific domain

Semiconductor Technology

Microsystems Engineering

Nanotechnology

Keywords

MST

Semiconductor Technology

Optical Microscopy

Wafer Inspection

Home partner institution

Otto von Guericke University Magdeburg

Website

https://www.ovgu.de/unimagdeburg/en/microtechnologysupportunit-p-131854.html

Technical staff available

Yes

Remote access details

false

Equipment

Axio Imager Z2 Vario, Carl Zeiss GmbH

Open access to updated information database

Yes

Online booking system details

manual calender app