Mask Aligner in ISO Class 5 Cleanroom

Mask aligner with the BA6 prebond option, backside alignment using video microscopes, topside microscopes with IR cameras. Mask holders for 5“ and 7” masks; substrate holders for substrates ranging from 2" to 150 mm, with some models also compatible with square substrates; front- and backside alignment; mask contact and proximity modes; sub-micron resolution in contact mode; 2.5 µm resolution in proximity mode; dual-video/split-field microscope; various vacuum chucks and mask holders. Share on